{"product_id":"82756","title":"Matrix 104 Etcher \/ Asher","description":"Matrix 104 Etcher \/ Asher, 4\" to 6\"\u003cbr\u003ePlasma Power:\u003cbr\u003e- RF 100-500 W Auto-tune\u003cbr\u003e- 600 Watts maximum\u003cbr\u003e- 13.56 MHz\u003cbr\u003eWafer Size Capability: \u003cbr\u003e- Round Silicon and GaAs Wafers\u003cbr\u003e- 4.5\" square substrates\u003cbr\u003eCassette Platform:\u003cbr\u003e- Adjustable\u003cbr\u003eClosed Loop Pressure Control:\u003cbr\u003e- Tylan Butterfly Valve \u003cbr\u003e- Capacitance Manometer\u003cbr\u003eLatest Software Version \/ Overhead Time:\u003cbr\u003e- 4.07CX10 \/ 32 sec\u003cbr\u003eTemperature Control of Wafer Chuck:\u003cbr\u003e- Resistive Element Heater \u0026amp;\u003cbr\u003eWater Circulated Chuck:\u003cbr\u003e- 25°C - 80°C (+\/-5°C)\u003cbr\u003e- Heater only \u0026amp; with TCU off\u003cbr\u003e- Can operate to \u0026gt;120C\u003cbr\u003e- (Chuck Electrically Grounded)\u003cbr\u003ePlasma Chamber \/ Electrode Design:\u003cbr\u003e- Side Shooter Gas Inlet \/ Full Meshed Electrodes\u003cbr\u003eNo Baffle Design\u003cbr\u003eNo Baseplate Cooling\u003cbr\u003eWafer Cooling Station\u003cbr\u003eProcess:\u003cbr\u003e- Throughput: \u0026gt;40 WPH Descum\u003cbr\u003e- Process Gases: 02 \u0026amp; H2N2 Standard (3rd MFC optional)\u003cbr\u003eStrip Rate (6\" wafers, 1.2 μ 120°C baked resist):\u003cbr\u003e- \u0026gt;1000 A\/min @ 60°C \u0026gt;3000 A\/min @ 100°C\u003cbr\u003eRepeatability + 10%\u003cbr\u003eNon-uniformity, 1 sigma: \u0026lt; 5%\u003cbr\u003eParticulates added\/ size: \u0026lt;0.10 \/ cm2 \u0026gt; 0.2mm\u003cbr\u003eMin Vacuum Pump speed: 26 CFM\u003cbr\u003eReliability:\u003cbr\u003e- Availability: \u0026gt; 95%\u003cbr\u003e- MTBF: \u0026gt; 450 hours\u003cbr\u003e- MTBA: \u0026gt; 24 hours\u003cbr\u003e- MTTR: \u0026lt; 4 hours","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44831946735806,"sku":"82756","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/82756","provider":"Bridge Tronic Global","version":"1.0","type":"link"}