{"product_id":"82524","title":"Yes 450 PB 12 Polyimide Bake Oven","description":"Yes 450 PB 12 Polyimide Bake Oven\u003cbr\u003e- Capacity is two 25 wafer cassettes in a batch process (50 wafers at a time) - 300mm FOUP\u003cbr\u003e- Uses wafer cassette (manually bring wafer to the machine, then load wafers inside)\u003cbr\u003e- Chamber Material: 316L Stainless Steel\u003cbr\u003e- Operation Temperature: ambient to 450°C (option high temp version: Ambient to 550°()\u003cbr\u003e- Process Gas Inputs: 1 standard up to 3 optional\u003cbr\u003e- Preheated N, (Process Gas)\u003cbr\u003e- Includes full-dimension 100-micron inlet for preheated laminar nitrogen purge\u003cbr\u003e- Dual door 0-Rings with nitrogen purge between the seals, eliminates oxygen leakage through door seal\u003cbr\u003e- Mass Flow Controllers: optional, up to 3\u003cbr\u003e- Laminar Flow Filter: 100 micron Mott'\" plate filter\u003cbr\u003e- Cleanliness: particle reduction in most applications\u003cbr\u003e- Manual Throttle Valve assembly\u003cbr\u003e- Air-cooled chamber with external forced air convection\u003cbr\u003e- Alternate vacuum valve for process vacuum\u003cbr\u003e- Vacuum plumbing with VCR\u003cbr\u003e- Swagelok 1\" lines and valves\u003cbr\u003e- Shut-off switch located below door to shut off heaters if door is opened\u003cbr\u003e- Dual Condensate Filter Assembly\u003cbr\u003eController Assembly\u003cbr\u003e- Color Touch Screen Operator Interface\u003cbr\u003e- Number of Recipes: 8 temperature profiles (up to 200 with YES - DAQ-LR option)\u003cbr\u003e- PLC controller\u003cbr\u003e- RS-232 Interface for Controller to download\/monitor programs\u003cbr\u003e- Ambient to 450°C with LED temperature and set point displays\u003cbr\u003e- Multiple temperature dependent PID setting in temperature controller\u003cbr\u003e- Operation Temperature: Ambient to 450° C with LED temperature readout and ramp-up\/down capability\u003cbr\u003e- Audible \"Cycle Complete\" Indicator\u003cbr\u003e- Digital Granville-Phillips'\" double set point vacuum gauge\u003cbr\u003e- High and Low pressure nitrogen checkpoint\u003cbr\u003e- Overtemp protection shut-off\u003cbr\u003e- Visual cycle complete\u003cbr\u003e- Light Tower with 11 abort, 11 11 cyde compete\" and 11 running 11 lights with audible alarm\u003cbr\u003e- EMO (front and rear)\u003cbr\u003eSystem Specifications\u003cbr\u003e- 208V, 3 Phase 50\/60 Hz, 40 amps\u003cbr\u003e- Average heat-up rate 3.5* C\/min (from 150' C - 450' C)\u003cbr\u003e- Average cool down rate 3,0' C\/min (from 450' C - 150' C)\u003cbr\u003e- Temperature uniformity+\/- 5,0' Cat dwell* after all temperature points have stabilized for 15 minutes (empty chamber at pressures above 50 TORR)\u003cbr\u003e- Oxygen Concentration: 10 ppm over background\u003cbr\u003e- Cassette Guide\u003cbr\u003e- 02 Analyzer with RS-485 Communication dry (scroll) pump required for this option\u003cbr\u003e- Filter Replacement Kit - 02 Analyzer\u003cbr\u003e- YES-DAQ-LR - Recipe Management with SECS\/GEM Interface\u003cbr\u003e- Real time data collection of all process control data","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44831937233086,"sku":"82524","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/82524","provider":"Bridge Tronic Global","version":"1.0","type":"link"}