{"product_id":"82523","title":"Veeco WaferStorm 3303 Automated Solvent Processor","description":"Veeco WaferStorm 3303 Automated Solvent Processor\u003cbr\u003e- Single 300mm FOUP load port for high volume platform\u003cbr\u003e- Stainless steel with mirror finish\u003cbr\u003e- PC-based user interface with local data storage\u003cbr\u003e- SOL-based database RAID drive for control system and data storage\u003cbr\u003e- SECS\/GEM software for host interface \u003cbr\u003e- CO2 Fire suppression system for 90\" frame\u003cbr\u003e- IR detector, 120-degree viewing angle and Linear Heat Detector Wire\u003cbr\u003e- UPS battery backup for PC\u003cbr\u003e- 3-Color LED status light lower (red, yellow, green) \u003cbr\u003e- ULPA Filter with Air Ionizer bar (Standard ESD level l) \u003cbr\u003e- Load port-TDK with wafer mapping and RFID reader\u003cbr\u003e- 200-mm adapter plate (Allows 200mm Cassette in place of 300mm FOUP)\u003cbr\u003eRobotic wafer handler:\u003cbr\u003e- vertical, rotary, two paddle axes\u003cbr\u003e- additional paddle axis (2)\u003cbr\u003e- vacuum paddles (4)\u003cbr\u003e- wafer alignment with LED backlight, color camera, and PC image processing Handler cover drain\u003cbr\u003eStation 1: Solvent Immersion 200\/300mm (Fill by NMP Fresh Supply)\u003cbr\u003e- Solvent immersion station, SS construction with 2-kW heater and vertical agitation \u003cbr\u003e- Recirculation, While Knight pump with 9.0-µm and 0.1-µm filters\u003cbr\u003e- Cooling coils to cool solvent prior to draining\u003cbr\u003e- Heater-SS 3-kW, single path: 6kW total heat (2)\u003cbr\u003e- DFR solvent strainer: Triple-Stage with automatic flush feature\u003cbr\u003eStation 2: MLO Spin Process chamber with grip actuator and spindle motor\u003cbr\u003e- Haler chamber with exhaust pressure, temperature and cover interlock sensors \u003cbr\u003e- CCD camera for chamber monitoring and video archive with LED lighting\u003cbr\u003eSpin chuck-200\/300mm (Active Edge Grip, Stainless Steel)\u003cbr\u003e- Dispense Arm 2 with dual-position feedback\u003cbr\u003e- Dispense A: LPD stream (NMP Fresh or Recirculated, Heated) \u003cbr\u003e- Dispense B: HPC Fan-spray (NMP Recirculated, Heated) \u003cbr\u003e- Dispense C: HPC Needle-spray (NMP Recirculated, Heated)\u003cbr\u003e- Continuous-duty 35:1 high-pressure pump and high-pressure filter\u003cbr\u003e- Heater-SS 2-kW, single path (Dispense A) \u003cbr\u003e- Heater-SS 2-kW, dual path (Dispense B\u0026amp;C)\u003cbr\u003e- Dispense Arm 3 with dual-position feedback\u003cbr\u003e- Dispense A: LPD stream (NMP Recirculated, Heated) Dispense B: High-velocity spray (NMP Recirculated, Heated)\u003cbr\u003e- Shared Heater-SS 3-kW, single path\u003cbr\u003e- Stationary wall-mounted dispenses with adjustable nozzles\u003cbr\u003e- Wall-dispense nozzle: (NMP Recirculated or Fresh, Heated)\u003cbr\u003e- Shared Heater-SS 3-kW, single path (Wall Dispense, Backside Rinse A\u0026amp;B)\u003cbr\u003e- Backside dispenses with adjustable nozzles\u003cbr\u003e- Backside nozzle-A\u0026amp;B: LPD Stream (NMP Recirculated or Fresh, Heated)\u003cbr\u003e- Chamber rinse--6 nozzles (NMP Recirculated, Ambient)\u003cbr\u003e- Drain diverter Teflon\"' 3-way (NMP recirculation\/Solvent drain)\u003cbr\u003eStation 3: SRD Spin Process chamber with grip actuator and spindle motor\u003cbr\u003e- Haler chamber with exhaust pressure, temperature and cover interlock sensors CCD camera with LED lighting\u003cbr\u003e- 02 Monitoring system: High-flow N2 purge with 02 sensor integrated into the chamber exhaust\u003cbr\u003e- Spin chuck-200\/300mm (Active Edge Grip, Stainless Steel)\u003cbr\u003e- Dispense Arm 2 with dual-position feedback\u003cbr\u003e- Dispense A: LPD stream (IPA Ambient) \u003cbr\u003e- Dispense B: High-velocity spray (IPA Ambient) - Dispense Arm 3 with dual-position feedback\u003cbr\u003e- Dispense A: LPD stream (DIW, Ambient)\u003cbr\u003e- Dispense Arm 4 with dual-position feedback\u003cbr\u003e- N2 heated dispense-with programmable 400-W heater, 0.003-µm filter\u003cbr\u003e- Stationary wall-mounted dispenses with adjustable nozzles\u003cbr\u003e- Wall-dispense nozzle A: (IPA, Ambient) Backside dispenses with adjustable nozzles Backside nozzles-A\u0026amp;B: (IPA, Ambient)\u003cbr\u003e- Chamber rinse--6 nozzles (IPA, Ambient)\u003cbr\u003e- Drain diverter Teflon 3-way (IPA drain\/Industrial drain)","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44831937200318,"sku":"82523","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/82523","provider":"Bridge Tronic Global","version":"1.0","type":"link"}