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SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station
SCREEN / DNS WS 820 L Wet Station

SCREEN / DNS WS 820 L Wet Station

Asset #: 81869

Make: SCREEN / DNS

Model: WS 820 L

Wafer Sizes: 8 inch

Last Confirm Date: July 25, 2024

SCREEN / DNS WS 820 L Wet Station, 8"
- SiN Wet Etching
- Process for Nitride Strip
- Chemical: H3PO4 , IPA , HF
- Rear type transfer flow
- IPA dryer fire extinguisher
- PLC (Loader / Unloader): Mitsubishi A3A CPU P21
- Olifra: wafer flatzone
- Main PC: Mitsubishi/LM (hard disket OK)
- Front carrier detector sensor
- Signal Tower: 3 color (GYR) Patlite lamp type
- 3 Phase, 208V, 170a, 100V
- 2 carrier loading (stocker 8 carrier loading
Robot:
- Left/ Right Stepping Motor (Oriental : VEXTA A 6259)
- Up/Down Stepping Motor (Oriental : VEXTA PK 596 H
Measuring Unit:
- H3PO4 Measuring Tank
- DIW Measuring Tank
- H 3 PO 4 DIW Spiking Pump
- HF Measuring Tank
- Resistivity meter DKK AQ 10 (Final Rinse)
Circulation:
- In-Line Heater
- Pump : FS 30 HT 2
- Filter: High Temp Filter
- Aspirator Drain
1997 Vintage

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