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Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 81546

Make: Applied Materials

Model: Producer GT

Last Confirm Date: July 23, 2024

Applied Materials Producer GT PECVD (Plasma-Enhanced Chemical Vapor Deposition)
- Process: FRE_HAS
- Software Version: B5.4_135
- System Power Rating: 208 AC 3-Phase
- Loading Configuration: 4 SELOP 7 25 WAFER FOUP
- Technology: DCVD
- Robot type: 0190-37624
- Robot Blades: Twin blade wafer Transfer robot(FX) 0200-08347
- LL preheater: 0090-04659
- Slit valve door: 9992-00594
- MF pump: IGX600L (Edwards)
- LL pump: (EPX 180 TWIN DRY VACCUM PUMP)3620-00517
- Chamber Type: Fresco
- Blocker: 0020-70842
- Liner: 3 piece
- RF Generator 1 (HF): APEX 3013 0920-00139
- RF Generator 2 (LF): 0223-00352
- Heater: HA-12 Tight RF Mesh with Clamp
0010-36738
- Slit Valve: 9992-00594
- Rf Filter: 0090-05831
- Foreline: 2 inch
- Foreline TV: (DNET, KF50 F/W 1.07 HIGH - SPD, KALREZ 808)0190-19203
- Foreline ISO: (VALVE PNEU BLWS ANGLE N/C KF-50 KALREZ 9)3870-05335
- Gas box: 0041-28308 (bypass type)
- Faceplate: 0020-84596
- Blocker: 0020-70842
- Pumping Liner Side1: 0200-02407
- Pumping Liner Side2: 0200-02408
- Liner Ceramic Top: 0200-04654
- Liner Ceramic Middle: 0200-02396
- Liner Ceramic Bottom: 0200-02397
- Ceramic Isolator: 0200-04235
- Lift Pins, Floating (Big Foot): (Lift Pin, Fixed Floating, 300mm) 0200-06840
- Lift Hoop: 0200-08334
- Spacer Side 1: 0021-24181
- Spacer Side 2: 0021-24182
- RPS: 0190-41326
- Gas Pallet Type: Surface mount
- Gas Box Configuration
- Line 1: SIH4 - 800SCCM
- Line 2: SIH4 - 300SCCM
- Line 3: NH3_LO - 500SCCM
- Line 4: NH3_HI - 4.0SLM
- Line 5: TMS - 200SCCM
- Line 6: NF3 - 5.0SLM
- Line 7: EMPTY
- Line 8: AR_CLN - 10.0SLM
- Line 9: 02 - 2.0 SLM
- Line 10: N2 - 25.0SLM
- Line 11: HE_HI - 15.0SLM
- Line 12: AR - 8.0 SLM
- Line 13: N2O_LO - 2.0 SLM
- Line 14: N2O_HI - 15.O SLM
- Line 15: HE_LO - 5.0 SLM
- Line 16: EMPTY
- Line 17: N2 PURGE01
- Line 18: N2 PURGE02
- Line 19: EMPTY
- Line 20: EMPTY
- Line 21: EMPTY
- Line 22: EMPTY
Damage/Missing parts list
- Process Vacuum Pump: Kashiyama SD1203B(Qty:3)
- Buffer pump: Edwards IH600L(Qty:1)
- Dry pumps 
- HDD not included
2010 Vintage

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