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KJL Sputtering System

Asset #: 81542

Make: KJL

Model: -

Wafer Sizes: 2, 3, 4, 12 inch

Last Confirm Date: July 22, 2024

KJL Sputtering System, up to 4"
- Single wafer system
- Square susceptor
- Custom load lock
- 3 sputter guns
- 2 DC and 1 RF power supply
- CTI8 Cryo pump / compressor
Note: main control box not operational

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