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Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter
Varian E 500 High Current Implanter

Varian E 500 High Current Implanter

Asset #: 81438

Make: Varian

Model: E 500

Wafer Sizes: 6 inch

Varian E 500 High Current Implanter, 6"
- Signal Tower: Front (Red, yellow, green)
- Production Wafer Qty': 1 wafer (single platen)
- Platen Type: Electrostatic Clamp
- Loadloack: Left/Right 2 Chambers
- S/w version: 13.30 Rev C
- Implant Monitor: LCD Touchscreen
- Service Monitor: LCD Touchscreen
System Vacuum:
- Ion Source Chambe: CCIG/Torr
- Beamline Chamber: CCIG/Torr
- End Station Chamber: CCIG/Torr
Pumps:
- Source Dry Punp: iQDP 80
- Stage Pump: iQDP 80+QMB 500
- Loadlock Rough Pump: iQDP 80
- Loadlock Turbo Pump: CT 4 L & CT 4 R: P/N: 8108998G001 & 8108999G001
- Process Chamber: CT 250 P/N: 8039113
- Source Turbo Pump: Pfeiffer TPH 1201 P / P/N: PMP 03702
- Resolver Turbo Pump: Pfeiffer HiPace 300
- Beamline Turbo Pump: Pfeiffer HiPace 700Gas Box Upgrade:
- SDS Capable
- 2 SDS sticks
- 2 High pressure sticks
1994 Vintage

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