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Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter
Varian E 500 HP Medium Current Ion Implanter

Varian E 500 HP Medium Current Ion Implanter

Asset #: 81381

Make: Varian

Model: E 500 HP

Wafer Sizes: 6 inch

Varian E 500 HP Medium Current Ion Implanter, 6"
- 3 Phase
- 5 Wire
Upgraded from E220 to E500 by AMAT in 2019:
- IHC HE++ Only SRC Bernas Upgrade
- SiF4 & external Helium Upgrade
- 150mm size conversion
- KIT,E-CLAMP SIZE,150MM *UPG*
- Convert from LL Cryos to Turbo Pumps
- 150mm conversion with E-Clamp
- Later converted to 150mm mechanical clamp
- Control system upgrade
- Flat Panel's Display upgrade
- Air Bearing + Replacement
1994 Vintage

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