Evatec Radiance RAD BPM 3 Optic Sputtering System
With:
Sputtering sources (rotating target, stationary magnet system):
- SSC 300/320 RT DC in chamber S2, 1pc
- SSC 300/320 RT RF in chambers S3 and S6, 2pcs
Plasma sources:
- PSC 301 in chamber S4, 1 pc
Power supplies:
- DC AE pinnacle plus 10kW M/N 3152536-360 E, connected to S3
- DC AE pinnacle plus 10kW M/N 3152536-360 E connected to S6
- AE Cesar 1350 RF power generator 5kW M/N 61300109 L connected to S4
- AE navio match network M/N 3155403-001 B mounted on S4
- AE Cesar 1320 RF power generator 2kW M/N 61300073 J previously used on S4, now
disconnected and not used, condition unknown
- AE navio match network M/N 3155405-001 C not connected, condition unknown
- AE navio match network M/N 3155405-001 C mounted on S3, was never used, condition
unknown
- TDK-Lambda GENH30-25 LOC-519A163-0001, x2 pcs
- 14 rotating chucks + 1 stationary chuck for monitoring. Coats 14 6" substrates in one batch - If monitoring is not used, 15 substrates can be coated, but the 15th substrate is on a stationary
chuck and may have different uniformity.
- MLL single substrate loading
- Clivet WSA-XIN 131 Chller
- CTI Cryogenics 9600 Compressor
- UPS GTEC ST030T-08
- Edwards XDS35i Forevacuum Pump
- Edwards iLX120 Forevacuum Pump
Sputtering targets:
- Silicon (Si), half used, 3pcs
- Tantalum (Ta), half used, 1 pc
- Niobium (Nb), half used, 1pc
Spare parts:
- MFC N2 100 sccm, Model: MF1C01312CBFV0, 2pcs
- MFC Ar 200 sccm, Model: MF1C00422CBFV0, 1pc
- Shieldings 2nd full set, used, 1pc
- Anode set, used, 16pcs
- Shutter, used, 12pcs
- Gas shower, used, 14pcs
- PCS pot, used, 1pc
- Sputtering source flange, used, 2pcs
- Set of transportation wheels, used, 1pc
- FloTron™ Power supply, new , 1pc
- Digital precision pressure switch, new, 1pc
- Y-splitter PROFIBUS HiPace, new, 1pc
- Solid state switch, new, 2pcs
- Proximity switch IME08 50mm, new, 1pc
- Optical sensor head, new, 4pcs
- Hlcps spring, sst, new, 10pcs
Substrate holders
- substrate holder for witness 25.4 mm dia., used, 6 sets
- substrate holder for test samples 25.4mm dia., used, 13 sets
- holder for 48mm dia. substrates, used, 14pcs
- holder for 101,6mm dia. substrates, used, 24pcs
- holder for 50mm dia. substrates, used, 22pcs
- holder for 50,8mm dia substrates, used, 27pcs
- holder for 76,2mm dia substrates, used, 19pcs
- holder for 23,8mm dia substrates, used, 13pcs
- holder for 25mm dia substrates, used, 20pcs
- holder for 21,5mm dia substrates, used, 6pcs
- holder for 30,5mm dia substrates, used 12pcs
- holder for 30mm dia substrates, used, 13pcs
- holder for 101,5mmx38mm substrates, used, 12pcs
- holder for 41mmx33mm substrates, used, 6pcs
- holder for 25,4mm dia substrates, used, 18pcs
- holder for 37mm dia substrates, used, 7pcs
- holder for 50,8mmx25,4mm substrates, used, 6pcs
- holder for 180mm dia. substrates, used, 9pcs
- holder for 100mm dia. substrates, used, 15pcs
- holder for 12,7mm dia. substrates, used, 10pcs
- holder for 55mm dia. substrates, used, 9pcs
- holders for other various square dimensions substrates, used, 220pcs
- holders for other various circular dimensions substrates, used, 200pcs
- aluminum cover for substrate holders, used, 55pcs
Issues:
- Faulty GSM 1100 module
- Faulty Sputtering Source 300/320 RT (station 2 in the layout diagram)
- Faulty forevacuum pump Edwards iLX120
2015 Vintage