{"product_id":"80916","title":"Oxford PlasmaPro NGP 1000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford PlasmaPro NGP 1000 PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- up to 450mm wafer size\u003cbr\u003e- Load Locked Chamber \u003cbr\u003e- System PC, Keyboard, Mouse\u003cbr\u003e- Windows 7 w\/ PC4500 Control Software\u003cbr\u003e- X20 PLC\u003cbr\u003e- 490mm Diameter Aluminum Lower Electrode\u003cbr\u003e- Capable of running up 450mm wafers\u003cbr\u003e- Up to 400*C\u003cbr\u003e- Chamber Heating Kit (Heats Chamber Sidewalls to Minimize Process Deposition)\u003cbr\u003e- Dual Frequency RF with Pulsing for Film Stress Control\u003cbr\u003e- 600W 13.56Mhz HF RF Generator\u003cbr\u003e- 600W 100khz LF RF Generator\u003cbr\u003e- Gas-Shock assisted Chamber Lift Mechanism\u003cbr\u003e- Adixen ADS602P Dry Pump for Process Chamber\u003cbr\u003e- Load Lock vacuum pump\u003cbr\u003e- Operations Manual and Documentation\u003cbr\u003eX20 External Gas Box with up to 12 Gas Lines.  Currently Configured for: He, CF4, N2, N20,  NH3, SiH4-N2\u003cbr\u003eFully Refurbished to excellent condition\u003cbr\u003e Chamber disassembled for refurbishment.\u003cbr\u003e- Chamber received full wet clean\u003cbr\u003e- Chamber o-rings and seals are replaced with brand new\u003cbr\u003e- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)\u003cbr\u003e- All MFCs rebuilt and calibrated professionally.\u003cbr\u003e- All corrosive gas lines replaced with brand new\u003cbr\u003e- All Non-corrosive gas lines purged\u003cbr\u003e- Vacuum pumps professionally rebuilt\u003cbr\u003e- Turbo pump professionally rebuilt\u003cbr\u003e- Chillers serviced and fully tested\u003cbr\u003e- All wiring\/wire harnesses are checked, repaired or replaced if needed\u003cbr\u003e- All liquid and air lines, tubing and fittings checked and replaced if necessary\u003cbr\u003e- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.\u003cbr\u003e- Checkout of all electronic and mechanical parts\u003cbr\u003e- Machine covers are cleaned, polished or replaced as needed\u003cbr\u003e- Post-refurbishment system leak and RF calibration checks, with documentation provided\u003cbr\u003e- System cycle and repeatability testing completed prior to cover replacement and wipe down\u003cbr\u003e2012 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44818794152126,"sku":"80916","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-7_f4b5430d-9188-4c9d-a27b-8f26b0f65531.jpg?v=1739718375","url":"https:\/\/www.bridgetronic.com\/products\/80916","provider":"Bridge Tronic Global","version":"1.0","type":"link"}