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Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)
Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)

Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma)

Asset #: 80555

Make: Plasmatherm

Model: SLR 770

Wafer Sizes: 4 inch

Last Confirm Date: June 20, 2024

Plasmatherm SLR 770 ICP Deep Silicon Etcher (Inductively Coupled Plasma), 4"
- Load lock shuttle lock transfer
- Single chamber
Gas Box:
- Horiba SEC-E40 (4)
- Process Gas: O2, Ar, SF6, C4F6
Controller & RF Generator:
- RFPP
- RF Power Products RFPP I22050001 & I20050007 Adaptive Pressure Controller
- VAT PM-5 Heater Controller
- Plasmatherm
- PC & OS
- Plasmatherm PC OS
RF Generator:
- RF Power Products RFPP RF5S & AM-5
- Seren R3001
Turbo Pump & Controller:
- Leybold MAG 2000
- Leybold MD 2000
Chiller: Neslab HX300
Power Box: Square D
1998 Vintage

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