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ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner
ASML Twinscan XT 1950 Hi Scanner

ASML Twinscan XT 1950 Hi Scanner

Asset #: 80550

Make: ASML

Model: Twinscan XT 1950 Hi

ASML Twinscan XT 1950 Hi Scanner
- Resolution: 38nm
- Overlay: 4 nm SMO / 7 nm MMO
- Laser Power: 60W
- Throughput: 300mm wafers / 148wph / (125 exp 30 mJ)
- with HDD
- 193nm immersion Scanner capable of 38nm resolution
- Zeiss Starlith 1950 with max NA of 1.35 or equivalent Illumination System
- Aerial XP Illumination System – P-Type Illuminator Alignment β€” Blue Align with Athena Narrow Marks Leveling
- Focus and Field-by-Field Leveling Reticle Management
- Load Ports Laser
- Cymer XLR-560i 193nm 60W/6khz Laser with E95 bandwidth monitoring Environment
- Class 1 Environment with Semi compliant MENV and FIMS assemblies Controls
- Unix/Sun Architecture
- Received & In-Service Sep/2010 Model # XT:1950Hi (300mm) Projection Lens
2010 Vintage

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