Heidelberg DWL 2000 Laser Pattern Generator and Direct Writer
- Diode laser (air cooling):
- laser wavelength: 405 nm
- output power: 100 mW
- typical lifetime: 7500 hrs
- Write Mode I, feature size 0.6 µm, address grid 10 nm
- Optical Autofocus
- Environment chamber:
- laminar airflow (adjustable): 0.3 - 0.5 m/s
- temperature stability: ± 0.1*C (at ±1*C outside the box)
- air quality: Class 10 (if clean room is class 100 or better)
- Base granite with air cushions for vibration isolation
- Metrology system with macro and micro camera for measurements and alignment
- Air-gauge autofocus with a range of 80 um
- Stage system with linear motors, air bearings and interferometric position control:
- maximum substrate size: 9” x 9”
- maximum write area: 200 x 200 mm2 (min. 5 mm from substrate edge)
- substrate thickness: 0 to 7 mm
- position resolution: 10 nm
- Electronics for interferometer, stage and autofocus system, a real time pixel generator, and image processing hardware
- Control PCs for system control and data conversion
- Software: (OS9) and graphical user interface (MS Windows)
- Conversion software (Linux) for DXF, CIF, GDSII, and Gerber file formats