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SPTS / STS MACS ICP Etcher
SPTS / STS MACS ICP Etcher
SPTS / STS MACS ICP Etcher

SPTS / STS MACS ICP Etcher

Asset #: 80542

Make: SPTS / STS

Model: MACS ICP

Wafer Sizes: 8 inch

Last Confirm Date: June 19, 2024

SPTS / STS MACS ICP Etcher, 8"
- HR chamber
- 6", 8" capable
- MACS loader for cassette to cassette operation (2 load stations)
- Carousel vacuum load lock
- Helium backside cooling (HBC)
- Clamp type: standard WTC
RF Generators:
- Coil RF power: Advanced Energy RFG3001, 3kw
- Platen RF power: ENI ACG-3B 13.56MHZ, 300w
Gases:
- C4F8 (200 sccm)
- SF6 (1000 sccm)
- O2 (200 sccm)
- Ar (50 sccm)
Vacuum System:
- Load lock pump: Ebara AAL10
- Chamber pump: Ebara A30W
- Turbo pump: Leybold MAG2000CT
- Turbo Pump Controller: Leybold MAG Drive 2000
Chiller: ATS/DEX-20ADI
Refurbished
2002 Vintage

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