{"product_id":"80542","title":"SPTS \/ STS MACS ICP Etcher","description":"SPTS \/ STS MACS ICP Etcher, 8\"\u003cbr\u003e- HR chamber\u003cbr\u003e- 6\", 8\" capable\u003cbr\u003e- MACS loader for cassette to cassette operation (2 load stations)\u003cbr\u003e- Carousel vacuum load lock\u003cbr\u003e- Helium backside cooling (HBC)\u003cbr\u003e- Clamp type: standard WTC\u003cbr\u003eRF Generators:\u003cbr\u003e- Coil RF power: Advanced Energy RFG3001, 3kw\u003cbr\u003e- Platen RF power: ENI ACG-3B 13.56MHZ, 300w\u003cbr\u003eGases:\u003cbr\u003e- C4F8 (200 sccm)\u003cbr\u003e- SF6 (1000 sccm)\u003cbr\u003e- O2 (200 sccm)\u003cbr\u003e- Ar (50 sccm)\u003cbr\u003eVacuum System:\u003cbr\u003e- Load lock pump: Ebara AAL10\u003cbr\u003e- Chamber pump: Ebara A30W\u003cbr\u003e- Turbo pump: Leybold MAG2000CT\u003cbr\u003e- Turbo Pump Controller: Leybold MAG Drive 2000\u003cbr\u003eChiller: ATS\/DEX-20ADI\u003cbr\u003eRefurbished\u003cbr\u003e2002 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44818786615486,"sku":"80542","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-73.jpg?v=1739716594","url":"https:\/\/www.bridgetronic.com\/products\/80542","provider":"Bridge Tronic Global","version":"1.0","type":"link"}