{"product_id":"80495","title":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Oxford Plasmalab 100 PECVD (Plasma-Enhanced Chemical Vapor Deposition), up to 8\"\u003cbr\u003e- Includes ICP Rie 380 Etcher\u003cbr\u003eGas Supply (PECVD):\u003cbr\u003e- MFC MKS 1479A - Corrosive Gas: 5% SiH4\/N2, NH3\u003cbr\u003e- MFC MKS 1179A - Non-corrosive gas: CF4, N2, N2O\u003cbr\u003eGas Supply (ICP-RIE):\u003cbr\u003e- MFC MKS 1479 A - Corrosive gas: CI2, BCI3, HBr (SiCI4)\u003cbr\u003e- MFC MKS 1179A - Non-corrosive gas: O2, Ar, SF6\u003cbr\u003e- 415V Heated Gas Kit - Required as SiCI4, BCI3, C4F8\u003cbr\u003e2009 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44818785108158,"sku":"80495","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2-51_323ce75c-305f-4e81-a4c8-4c8b2c0befcb.jpg?v=1739716322","url":"https:\/\/www.bridgetronic.com\/products\/80495","provider":"Bridge Tronic Global","version":"1.0","type":"link"}