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KLA 5100 Overlay Measurement System

Asset #: 80061

Make: KLA

Model: 5100

Wafer Sizes: 8 inch

Last Confirm Date: June 11, 2024

KLA 5100 Overlay Measurement System, 8"
- OS: VMS
- Windows NT / VAX software
- SCSI Back up unit
- Thermal mini printer
- Dual SMIF Cassette loader, 200mm
Optical system:
- 12k and 750 micron FOV optical microscopes with light source
- 50 micron FOV microscope performs optical measurement, interferometer measurement, and autofocus

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