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ASM Epsilon 2000 CVD (Chemical Vapor Deposition)
ASM Epsilon 2000 CVD (Chemical Vapor Deposition)
ASM Epsilon 2000 CVD (Chemical Vapor Deposition)
ASM Epsilon 2000 CVD (Chemical Vapor Deposition)
ASM Epsilon 2000 CVD (Chemical Vapor Deposition)

ASM Epsilon 2000 CVD (Chemical Vapor Deposition)

Asset #: 79957

Make: ASM

Model: Epsilon 2000

Wafer Sizes: 6 inch

ASM Epsilon 2000 CVD (Chemical Vapor Deposition), 6"
- Supply Voltage/ Freq: 480/ 50
- System Hand: Right Hand
- Monitor Type: Flat Panel
- Wafer Size: 150mm
- Maint Console: Mini Maint
- CPU: 68040
- Software Version: 7.65
- Comms: HSMS
- RP/ ATM: RP
- Vacuum Load Locks: No
- WHC Gate Valve: Swing
- WHC Robot Arm: Wide
- Reactor Isolation: HVA
- ATM Valve: VAT
- Pressure Controller: MKS 152 Analogue
- PCV Type: MKS 253B
- Choke Valve: Yes
- RP Orientation: Bottom Feed
- Gas Panel Orientation: Top Feed
- Main H2/N2: 100slm
- Cross Purge Valves: Yes
- Dep/ Vent Transition Valves: Yes
- ATM/RP Vent: Yes
- Shaft MFC: 5slm
- P Dopant Loop: Yes
- P loop MFC's Dil/SRC/INJ: 20slm/200/200
- N Dopant Loop: Yes Teed PH3/ AsH3
- N loop MFC's Dil/SRC/INJ: 20slm/175/175
- Aux1: SiH2Cl2 500sccm
- Aux2: No
- Aux3: No
- Aux4: No
- Aux5: No
- HCL Hi: Yes 20slm
- HCl Low: Yes 2000sccm
- Precision Vent Matching: No
- TCS: 25gpm LVC
- DCS Cabinet: Yes
- TCS Mini Bubbler: 10L LPE
- Gas Detection: Gastec H2/ HCl
- Temperature Controller: Foxboro
- Analog Ratio Control: Yes
- Dual Ratio: No

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