{"product_id":"79949","title":"ASM Epsilon 2000 CVD (Chemical Vapor Deposition)","description":"ASM Epsilon 2000 CVD (Chemical Vapor Deposition), 8\"\u003cbr\u003e- Supply Voltage\/ Freq: 480\/ 50\u003cbr\u003e- System Hand: Left Hand\u003cbr\u003e- Monitor Type: Flat Panel\u003cbr\u003e- Wafer Size: 200mm\u003cbr\u003e- Maint Console: Mini Maint\u003cbr\u003e- CPU: 68040\u003cbr\u003e- Software Version: 7.65\u003cbr\u003e- Comms: HSMS\u003cbr\u003e- RP\/ ATM: RP\u003cbr\u003e- Vacuum Load Locks: No\u003cbr\u003e- WHC Gate Valve: Swing\u003cbr\u003e- WHC Robot Arm: Wide\u003cbr\u003e- Reactor Isolation: HVA\u003cbr\u003e- ATM Valve: VAT\u003cbr\u003e- Pressure Controller: MKS 152 Analogue\u003cbr\u003e- PCV Type: MKS 253B\u003cbr\u003e- Choke Valve: Yes\u003cbr\u003e- RP Orientation: Bottom Feed\u003cbr\u003e- Gas Panel Orientation: Top Feed\u003cbr\u003e- Main H2\/N2: 100slm\u003cbr\u003e- Cross Purge Valves: Yes\u003cbr\u003e- Dep\/ Vent Transition Valves: Yes\u003cbr\u003e- ATM\/RP Vent: Yes\u003cbr\u003e- Shaft MFC: 5slm\u003cbr\u003e- P Dopant Loop: Yes\u003cbr\u003e- P loop MFC's Dil\/SRC\/INJ: 20slm\/200\/200\u003cbr\u003e- N Dopant Loop: Yes Teed PH3\/ AsH3\u003cbr\u003e- N loop MFC's Dil\/SRC\/INJ: 20slm\/200\/200\u003cbr\u003e- Aux1: SiH2Cl2 500sccm\u003cbr\u003e- Aux2: SiH4 105sccm\u003cbr\u003e- Aux3: No\u003cbr\u003e- Aux4: No\u003cbr\u003e- Aux5: No\u003cbr\u003e- HCL Hi: Yes 20slm\u003cbr\u003e- HCl Low: Yes 2000sccm\u003cbr\u003e- Precision Vent Matching: No\u003cbr\u003e- TCS: 25gpm LVC\u003cbr\u003e- DCS Cabinet: Yes\u003cbr\u003e- TCS Mini Bubbler: 10L LPE\u003cbr\u003e- Gas Detection: Gastec H2\/ HCl\u003cbr\u003e- Temperature Controller: Foxboro\u003cbr\u003e- Analog Ratio Control: Yes\u003cbr\u003e- Dual Ratio: No\u003cbr\u003e2001 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817289085118,"sku":"79949","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/IMG_9661-1.jpg?v=1739715436","url":"https:\/\/www.bridgetronic.com\/products\/79949","provider":"Bridge Tronic Global","version":"1.0","type":"link"}