{"product_id":"79921","title":"Axcelis NV GSD HE Ion Implanter","description":"Axcelis NV GSD HE Ion Implanter, 8\"\u003cbr\u003e- Wafer Size: Originally 6\", converted to 8\"\u003cbr\u003e- Power Supply: 3-Phase, 480 VAC, 60 Hz\u003cbr\u003e- Full Load Current: 99 A\u003cbr\u003e- Power Rating: 82 kVA\u003cbr\u003e- Input Breaker: 150 A\u003cbr\u003e- Maximum Interrupt Capacity: 14 kA\u003cbr\u003e- Beam Energy: 1 MeV\u003cbr\u003e- Beam Current: 1 mA\u003cbr\u003eDe-facilitation \/ Safety Preparation\u003cbr\u003e- Hazardous gas lines purged and prepared\u003cbr\u003e- Hazardous gas lines cut and capped\u003cbr\u003e- Hazardous chemical supply lines flushed and capped\u003cbr\u003e- All chemicals and liquids removed\u003cbr\u003e- Cleaning PMs performed\u003cbr\u003e- FMS wires terminated\u003cbr\u003e- Non-hazardous gases\/liquids terminated\u003cbr\u003e- Waste lines cut and capped\u003cbr\u003e- Exhaust ducts removed and wrapped\u003cbr\u003e- Electrical de-facilitation completed\u003cbr\u003e- All openings properly capped\u003cbr\u003e- Interior and exterior surfaces cleaned\u003cbr\u003eMajor Components\u003cbr\u003e- End Station\u003cbr\u003e- Beam Line\u003cbr\u003e- Source Terminal\u003cbr\u003e- Source Housing\u003cbr\u003e- Analyzer\u003cbr\u003e- Power racks (3)\u003cbr\u003e- Gas Box: Argon, Arsine, Phosphine\u003cbr\u003e- PC \u0026amp; Monitor Rack\u003cbr\u003e- SMIF Interface\u003cbr\u003e- Top Panels: 1 \u0026amp; 2\u003cbr\u003e- Bottom Plate\u003cbr\u003eVacuum \u0026amp; Cooling Equipment\u003cbr\u003e- Cryo Pumps: CTI On-Board 250F, CTI On-Board 10, CTI On-Board 8\u003cbr\u003e- Compressor: CTI 9600 (2)\u003cbr\u003e- Turbo Pump: Leybold 75 M\u003cbr\u003e- Chillers: Affinity RWA-012J-BE03CB, Affinity CWA-200LM-015CBD\u003cbr\u003ePalletized Items\u003cbr\u003e- End Station Door\u003cbr\u003e- Terminal Door, Hoses, Cables\u003cbr\u003e- Top Plate\u003cbr\u003e- Generators, Stack\u003cbr\u003e- Beam Door\u003cbr\u003e- Door, Filter\u003cbr\u003e- Lamp, Filter\u003cbr\u003e- Compressor\u003cbr\u003e- Manuals, Accessories, Misc. Parts\u003cbr\u003e1999 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817288003774,"sku":"79921","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/Eaton_19.jpg?v=1746570084","url":"https:\/\/www.bridgetronic.com\/products\/79921","provider":"Bridge Tronic Global","version":"1.0","type":"link"}