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Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter
Axcelis NV GSD HE Ion Implanter

Axcelis NV GSD HE Ion Implanter

Asset #: 79921

Make: Axcelis

Model: NV GSD HE

Wafer Sizes: 8 inch

Axcelis NV GSD HE Ion Implanter, 8"
- Wafer Size: Originally 6", converted to 8"
- Power Supply: 3-Phase, 480 VAC, 60 Hz
- Full Load Current: 99 A
- Power Rating: 82 kVA
- Input Breaker: 150 A
- Maximum Interrupt Capacity: 14 kA
- Beam Energy: 1 MeV
- Beam Current: 1 mA
De-facilitation / Safety Preparation
- Hazardous gas lines purged and prepared
- Hazardous gas lines cut and capped
- Hazardous chemical supply lines flushed and capped
- All chemicals and liquids removed
- Cleaning PMs performed
- FMS wires terminated
- Non-hazardous gases/liquids terminated
- Waste lines cut and capped
- Exhaust ducts removed and wrapped
- Electrical de-facilitation completed
- All openings properly capped
- Interior and exterior surfaces cleaned
Major Components
- End Station
- Beam Line
- Source Terminal
- Source Housing
- Analyzer
- Power racks (3)
- Gas Box: Argon, Arsine, Phosphine
- PC & Monitor Rack
- SMIF Interface
- Top Panels: 1 & 2
- Bottom Plate
Vacuum & Cooling Equipment
- Cryo Pumps: CTI On-Board 250F, CTI On-Board 10, CTI On-Board 8
- Compressor: CTI 9600 (2)
- Turbo Pump: Leybold 75 M
- Chillers: Affinity RWA-012J-BE03CB, Affinity CWA-200LM-015CBD
Palletized Items
- End Station Door
- Terminal Door, Hoses, Cables
- Top Plate
- Generators, Stack
- Beam Door
- Door, Filter
- Lamp, Filter
- Compressor
- Manuals, Accessories, Misc. Parts
1999 Vintage

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