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ATMsse Maximus 804 Automatic Lift Off and Cleaning System
ATMsse Maximus 804 Automatic Lift Off and Cleaning System

ATMsse Maximus 804 Automatic Lift Off and Cleaning System

Asset #: 79186

Make: ATMsse

Model: Maximus 804

Last Confirm Date: May 08, 2024

ATMsse Maximus 804 Automatic Lift Off and Cleaning System
- Stainless steel
- Glass doors for process area
- Stainless steel doors for media / maintenance area
- 3-axis robot, class 1
- End effector vacuum standard for 0 2", 3" and 4" wafer
- Flat touch screen monitor
- Computer as controller and user interface
- Cassette loading plates for wafer 0 2", 3" and 4" cassette as 1/0
- Touch-less video pre-alignment for wafers up to 0 8" Light beacon
- Remote control, for quick log file checking for service and maintenance purposes via modem, ISDN interface or USB stick
- Software for easy programming of station recipes and flow recipes at the system or on a connected PC
- CE marked system
- An English manual on standard paper and a CD-ROM

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