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SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner
SUSS MJB 3 Mask Aligner

SUSS MJB 3 Mask Aligner

Asset #: 79166

Make: SUSS

Model: MJB 3

Wafer Sizes: 3, 4 inch

Last Confirm Date: May 07, 2024

SUSS MJB 3 Mask Aligner, 3", 4"
- Wafer: 3" max. for vacuum mode; 4 for soft contact (3 x 3 exposure area)
- Wafer / substrate thickness: 0-4.5mm
- Standard unit: 350-450nm / 200 W mercury lamp
- Ir unit: 280-450 nm/200 W mercury lamp (can filter to 350 nm)
- Duv (polychromatic): 240-260 nm/350 W Cd-Xe lamp; 0.2 micron resolution (PMMA)
- Duv (monochromatic): 248 nm/KrF excimer laser; 0.3 micron resolution (PMMA)
Lenses:
- LEITZ NPL 5 x / 0.09
- LEITZ NPL 10 x / 0.20
- LEITZ H 20 x / 0.40
Uniformity:
- 3% over 2" diameter
- 5% over 3" diameter

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