{"product_id":"78977","title":"Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition)","description":"Plasmatherm 790 RIE-PECVD (Reactive Ion Etcher - Plasma-Enhanced Chemical Vapor Deposition), up to 8\"\u003cbr\u003e- Right chamber: CHF3 (54sccm), O2 (20sccm), H2 (20sccm), Ar (50sccm)\u003cbr\u003e- Left chamber: Cl2 (20sccm), HBr (100sccm),\u003cbr\u003e- O2 (20sccm), CF4 (50 sccm), He (100sccm)\u003cbr\u003e- Turbo pump (10-5 Torr)\u003cbr\u003e- Compatible Materials: Si (to etch with Cr mask, use the ORANGE RIE batchtop), TMDs, and Graphene\u003cbr\u003e- Incompatible Materials: III-V \/ Hi K \/ Metal","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817252483262,"sku":"78977","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-3_55eac1f0-1723-4944-aa87-7a3c6b9d7f75.jpg?v=1739711573","url":"https:\/\/www.bridgetronic.com\/products\/78977","provider":"Bridge Tronic Global","version":"1.0","type":"link"}