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Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner
Semitool SAT Ozone Wafer Cleaner

Semitool SAT Ozone Wafer Cleaner

Asset #: 78949

Make: Semitool

Model: SAT

Semitool SAT Ozone Wafer Cleaner
- HydrOzone and FluorOzone
- Single bowl, 24"
Process Technology DI Water Heater:
- Model HCQ24-208-3-002-08
- Specs: 24000 W, 208V a.c., 3 Phase
INUSA Ozone Generator and Leak Detection system:
Semitool Ozone Delivery System:
- Model OZOMOD-STI-HO-0
- INUSA SCI-MUX Controller
- INUSA RB-5L Alarm De-Multiplexing
- INUSA IN2000-5 Multi-Channel Low-Concentration Analyzer
- INUSA Power Control Module
- INUSA Flow Control Panel
- Ozone Generator A: MKS AX8403L Ozone Generator, Rev. 1B
CO2 Fire Detection and Suppression System:
- Fire Suppression Systems Inc. Kidde Scorpio Control Panel with Dual Spectrum Detection
Spares & Additional Parts:
- Spares Kit with Most Parts Including a White Knight pump
- Ozone Destruct Upgrade (never installed): INUSA Heated Catalytic Destruct Module, CAT03-H
- Manganese Oxide Ozone Destruct Catalyst Media
- Other various spares including some valve actuators
- Cleanroom and CD system manuals
Repairs Needed:
- Repair failed ozone generation cell(s) in MKS AX8403L Ozone generator, Rev. 1B or trade in for MKS AX8407
- Computer upgrade to eliminate intermittent boot failures and reboot loops.
- Replace front user interface (current one is cut-off slightly and distorted at bottom of screen)
- RUI works, but an upgrade is suggested
- Install water flow interlock switch (includes the part, not yet installed). Currently by-passed

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