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Tel Expedius Plus Wet Bench
Tel Expedius Plus Wet Bench
Tel Expedius Plus Wet Bench
Tel Expedius Plus Wet Bench
Tel Expedius Plus Wet Bench
Tel Expedius Plus Wet Bench

Tel Expedius Plus Wet Bench

Asset #: 78937

Make: Tel

Model: Expedius Plus

Tel Expedius Plus Wet Bench
- Application: Pre-Diffusion Clean
Bath-1: SPM
Operating: 110 - 150°C, H2SO4/H2O2 (3:1), circulation
-Chemical spiking: auto concentration feedback
Bath Material: Quartz
Bath-2: QDR (hot)
Operating: DIW rinse (75°C, 40 – 80 L/min)
- Bath Material: PTFE
- Megasonic: 950 kHz, 2400W (600*4)
Bath-3: APM
- Operating: 35 - 85°C, NH4OH/H2O2/DIW (1:1:15), 15 L/min, circulation
- Chemical spiking: auto concentration feedback
- Bath Material: PTFE
- Megasonic: 950 kHz, 2400W (600*4)
Bath-4: POU
- Operating: 70°C, NH4OH/H2O2 DIW Shower (hot / cold)
- Bath Material: PTFE
- Megasonic: 950 kHz, 2400W (600*4)
Bath-5: HPM
- Operating: 35 - 80°C, HCL/H2O2/DIW (1:1:5)
- Bath Material: Quartz
Bath-6: QDR (hot)
- Operating: DIW rinse (75°C, 40 – 80 L/min) - Bath Material: PTFE
- Megasonic: 950 kHz, 2400W (600*4)
Dryer: SD2
- Operating: 49% DHF (1:200), IPA/N2 200°C, 100 L/min
- Resistivity monitoring (Horiba)
- Bath Material: PTFE
No HDD
IPA Detect Sensor damage SPM Bath damage
2007 Vintage

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