{"product_id":"78936","title":"Tel Expedius Plus Wet Bench","description":"Tel Expedius Plus Wet Bench\u003cbr\u003e- Application: Pre-Diffusion clean\u003cbr\u003eBath-1: SPM\u003cbr\u003e- Operating: 110 - 150°C, H2SO4\/H2O2 (3:1), circulation \u003cbr\u003e- Chemical spiking: auto concentration feedback\u003cbr\u003e- Bath Material: Quartz\u003cbr\u003eBath-2: QDR (hot)\u003cbr\u003e- Operating: DIW rinse (75°C, 40 – 80 L\/min) Injection: H2O2\/NH4OH\u003cbr\u003e- Bath Material: PTFE\u003cbr\u003e- Megasonic: 950 kHz, 2400W (600*4)\u003cbr\u003eBath-3: APM\u003cbr\u003e- Operating: 35 - 85°C, NH4OH\/H2O2\/DIW (1:1:15), 15 L\/min, circulation \u003cbr\u003e- Chemical spiking: auto concentration feedback\u003cbr\u003e- Bath Material: PTFE\u003cbr\u003e- Megasonic: 950 kHz, 2400W (600*4)\u003cbr\u003eBath-4: POU\u003cbr\u003e- Operating: 70°C, NH4OH\/H2O2 DIW Shower (hot \/ cold)\u003cbr\u003e- Bath Material: PTFE\u003cbr\u003e- Megasonic: 950 kHz, 2400W (600*4)\u003cbr\u003eDryer: SD2*2\u003cbr\u003e- Operating: 49% DHF (1:200), IPA\/N2 200°C, 100 L\/min\u003cbr\u003e- Resistivity monitoring (Horiba)\u003cbr\u003e- Bath Material: PTFE\u003cbr\u003eNo HDD\u003cbr\u003e2007 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817251238078,"sku":"78936","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1-65_fd1c890a-301e-4601-b749-f0b9c3ae0bae.jpg?v=1739711395","url":"https:\/\/www.bridgetronic.com\/products\/78936","provider":"Bridge Tronic Global","version":"1.0","type":"link"}