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Lam / Novellus Concept Two Altus W-CVD (Chemical Vapor Deposition)

Asset #: 77762

Make: Lam / Novellus

Model: Concept Two Altus

Wafer Sizes: 8 inch

Last Confirm Date: April 12, 2024

Lam / Novellus Concept Two Altus W-CVD (Chemical Vapor Deposition), 8"
- Nitride
- Non Shrink
- 1 Chamber standard
- 1 Chamber PNL Mod s
- Load Type :Standard
- Process Module Type: CVD-WS
Transfer Module Configuration
- DLCM Type: DLCM-3
- Cassette Interface: Platform
- Robot Type: Mag7
- Arm Set: Dual Arm
- Cool Station: 3-Level
- Pressure Guage: MKS 100torr
- Throttle Valve: MDV-015
- Throttle Valve Controller: Missing
Chamber Configuration
- Chamber B CVD: C2-CVD-WS(A)
- Chamber C CVD: C2-CVD-WS(A)
- Pedestal: 200mm
- Throttle Valve: MDVX-100b
- Isolation Valve: 14040-PE44-AAL2
- RF Matcher: Trazer, Amu2-1
- RF Generator: AE, RFG 3000
- Gas Configuration: Pm-B
- Gas-C Ar 5slpm
- Gas-D Ar 20slpm
- Gas-E Wf6 500sccm
- Gas-1 Ar 5slpm
- Gas-8 Ar 10slpm
- Gas-4 Ar 10slpm
- Gas-9 H2 25slpm
- Gas-3 H2 20slpm
- Gas-B 5% B2h6/N2 500sccm
- Gas-6 C2f6 2slpm
- Gas-5 Wf6 500sccm
- Gas-7 O2 2slpm
- Gas-2 Sih4 250sccm
- Mfm1 Ar 1slpm
Missing / Repair:
- Process/Transfer/LL/Pedestal Pumps
- Heater Jackets
- New Abatement System
- Controllers
- Heater Pedestals
- Showerheads
- Pressure Transducers
- 3 Way Pneumatic Valves
- 2 Way Pneumatic Valves
- Gas Sensors
- Shuttle/SMIF Loaders
- Throttle Valves
- Gate Valves
- RF Generator
- DLCM System Controller
- Power Supplies
1999 Vintage

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