{"product_id":"77525","title":"Lam \/ Novellus \/ Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)","description":"Lam \/ Novellus \/ Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)\u003cbr\u003e- 2x FOUP Loadports\u003cbr\u003e- Mini-Environment (Front End)\u003cbr\u003e- Atmospheric Robot\u003cbr\u003e- User Interface: screen \u0026amp; computer\u003cbr\u003e- Light Tower\u003cbr\u003e- 2x Loadlocks\u003cbr\u003e- 2x Loadlock Cooling Pedestals\u003cbr\u003e- 2x Linear Transfer Modules\u003cbr\u003e- 4x Showerheads (subject to availability)\u003cbr\u003e- Al Heater Pedestals with lift pins (station 1)\u003cbr\u003e- Al Heater Pedestals (stations 2-4)\u003cbr\u003e- Pneumatic Spindle\u003cbr\u003e- Integrated Liquid Delivery System (not on this particular configuration)\u003cbr\u003e- Low Frequency RF Generator\u003cbr\u003e- High Frequency RF Generator\u003cbr\u003e- RF Match\u003cbr\u003e- Endpoint Controller\u003cbr\u003e- Gas Box\u003cbr\u003e- Local Power Box\u003cbr\u003e- 3x Super Input \/ Output Controller\u003cbr\u003e- Motion Controller\u003cbr\u003e- Module Controller\u003cbr\u003e2005 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817237147838,"sku":"77525","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/1b-1_672f79c1-df68-4a1f-aa5e-5e950031c12b.jpg?v=1739709393","url":"https:\/\/www.bridgetronic.com\/products\/77525","provider":"Bridge Tronic Global","version":"1.0","type":"link"}