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Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)
Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)

Asset #: 77525

Make: Lam / Novellus / Gasonics

Model: Vector

Last Confirm Date: April 05, 2024

Lam / Novellus / Gasonics Vector PECVD (Plasma-Enhanced Chemical Vapor Deposition)
- 2x FOUP Loadports
- Mini-Environment (Front End)
- Atmospheric Robot
- User Interface: screen & computer
- Light Tower
- 2x Loadlocks
- 2x Loadlock Cooling Pedestals
- 2x Linear Transfer Modules
- 4x Showerheads (subject to availability)
- Al Heater Pedestals with lift pins (station 1)
- Al Heater Pedestals (stations 2-4)
- Pneumatic Spindle
- Integrated Liquid Delivery System (not on this particular configuration)
- Low Frequency RF Generator
- High Frequency RF Generator
- RF Match
- Endpoint Controller
- Gas Box
- Local Power Box
- 3x Super Input / Output Controller
- Motion Controller
- Module Controller
2005 Vintage

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