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Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 PVD (Physical Vapor Deposition)

Applied Materials Endura 5500 PVD (Physical Vapor Deposition)

Asset #: 77431

Make: Applied Materials

Model: Endura 5500

Wafer Sizes: 6 inch

Last Confirm Date: April 02, 2024

Applied Materials Endura 5500 PVD (Physical Vapor Deposition), 6"
Chamber Type:
- 1: Ti Durasource TTN
- 2: Refractory (Ge process)
- 3: Refractory (NiV process)
- 4: Titanium (Au process)
- Line Frequency: 60 Hz
- Line Voltage: 480V
- Facilities Power Indicator: No
- Transformer Type: 480Vl150kVA
- Main Contactor Delay: No
- Main AC Power Inlet Hole: Small
- Main AC ZCT Box: No
- CE Mark Required: No
- System EMO Type: Turn to Release ETI Compliant
- EMO Button Guard Ring: Included
- EMO Under Monolith: No
- Primary Side Trip Amperage Trip Unit 225A 3P For JD325OF Frame
- GFI on Primary with EMO Shunt Trip: No
- GFI on Secondary: No
- Circuit Breaker on Secondary: 400A
- GFI Trip Amperage: No
- System Water Leak Detector: Yes
- System Smoke Detector: No
- Additional Smoke Sensors: No
- Mainframe Facility Water Flow Interlock: No
- Support Chamber Facility Water Flow
Interlock: No
- Discharge Rods: No
- Monolith Bakeout Heater with Double Interlock: No
- AC Boxes Indicator Lamp Buttons: LED
- System Labels Language: English Only
- RF Gen LOTO Switch Location: At Generator Rack

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