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Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace
Koyo VF 5700 LP Vertical Furnace

Koyo VF 5700 LP Vertical Furnace

Asset #: 77306

Make: Koyo

Model: VF 5700 LP

Wafer Sizes: 12 inch

Last Confirm Date: November 08, 2024

Koyo VF 5700 LP Vertical Furnace, 12"
- Si wafers processed in furnace
- Current boat is for 300 mm (12") wafer size
- Boat and tubes are Quartz
- LGO heater V55 x 07
- Operation Temperature: 50-550Β° Celsius
- Manometer indicates chamber pressure
Maximum Pressure:
- Some recipe where idle pressure at 11 torr with Ar gas flow
- Idle Pressure at 1463 pa to 11 torr
Edwards iH1000 Dry Vacuum Pump Capacity:
- Pumping speed of 580 CFM
- Oil capacity of 1.48 liters
- Power input of 3.5 kW
- iH1000 has an ISO 100 inlet connection and an NW 40 outlet connection
- Also has 8.2 horsepower and 1,000 m3h
FE computer system needs updating
2002 Vintage

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