{"product_id":"77306","title":"Koyo VF 5700 LP Vertical Furnace","description":"Koyo VF 5700 LP Vertical Furnace, 12\"\u003cbr\u003e- Si wafers processed in furnace\u003cbr\u003e- Current boat is for 300 mm (12\") wafer size\u003cbr\u003e- Boat and tubes are Quartz\u003cbr\u003e- LGO heater V55 x 07\u003cbr\u003e- Operation Temperature: 50-550° Celsius\u003cbr\u003e- Manometer indicates chamber pressure\u003cbr\u003eMaximum Pressure:\u003cbr\u003e- Some recipe where idle pressure at 11 torr with Ar gas flow\u003cbr\u003e- Idle Pressure at 1463 pa to 11 torr\u003cbr\u003eEdwards iH1000 Dry Vacuum Pump Capacity:\u003cbr\u003e- Pumping speed of 580 CFM\u003cbr\u003e- Oil capacity of 1.48 liters\u003cbr\u003e- Power input of 3.5 kW\u003cbr\u003e- iH1000 has an ISO 100 inlet connection and an NW 40 outlet connection\u003cbr\u003e- Also has 8.2 horsepower and 1,000 m3h\u003cbr\u003eFE computer system needs updating\u003cbr\u003e2002 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817230069950,"sku":"77306","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/2-done-54_b2a3ec33-13fa-48c8-b543-f36d38ddd583.jpg?v=1743457086","url":"https:\/\/www.bridgetronic.com\/products\/77306","provider":"Bridge Tronic Global","version":"1.0","type":"link"}