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Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)
Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)

Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition)

Asset #: 77139

Make: Applied Materials

Model: Endura 5500 IMP

Wafer Sizes: 8 inch

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Applied Materials Endura 5500 IMP PVD (Physical Vapor Deposition), 8"
- Software Version: B8.01
- Wafer Type: Notch
- No SMIF Interface2 x OD
- PCII (2)
- IMP TiN (2)
- IMP Ti
- CTI 9600 Cryo compressor (2)
- Neslab chiller
- Gen racks (2)
- AC Box (2)
Electrical:
- Line Frequency: 50 Hz
- Line Voltage: 200-208 V
- Line Amperage: 320 A
System Information:
- Chamber A (Pre-Clean Chambers)
- Chamber B (Cool Down Chamber)
- Chamber C
- Chamber D
- Chamber E (Degas/Orienter Chamber)
- Chamber F (Degas/Orienter Chamber)
- Chamber 1
- Chamber 2
- Chamber 3
- Buffer Chamber
- Transfer Chamber
- Loadlock Type: Wide Body L/L
Chamber Type:
Chamber C
- Chamber Process: PC II
Chamber D
- Chamber Process: PC II
Chamber 1
- Chamber Process: IMPTiN
- Rough Pump Not Included
Chamber 2
- Chamber Process: IMPTiN
- Rough Pump Not Included
Chamber 3
- Chamber Process: IMPTiN
- Rough Pump Not Included
Buffer Chamber
- Robot: HP
2000 Vintage

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