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Beneq TFS 200 ALD (Atomic Layer Deposition)
Beneq TFS 200 ALD (Atomic Layer Deposition)

Beneq TFS 200 ALD (Atomic Layer Deposition)

Asset #: 77005

Make: Beneq

Model: TFS 200

Wafer Sizes: 8 inch

Beneq TFS 200 ALD (Atomic Layer Deposition), 8"
- Two Chambers (run plasma or thermal process)
- Can handle manual batch process TFS 200 338 Tool chamber and cables
- TFS 200 339 Tool chamber and cables
(+A2 Electrical cabinet for TF S200 338)
(+A2 Electrical cabinet for TFS 200 339)
- Hine HA 200 loader
- Liquid source bubbler single line 200ml
- Rack cabinet
- RF Generator
- Beckhoff panel pole PC
- Plasma head
- Holder lifter
- Substrate lifter
- Plastic hatch
- Reaction chamber ALU
- HS 300 Tank
- Liquid source bubbler single line 200ml
- Liquid source bubbler double line 200ml
- Liquid source bottle for H2O
- Documents
- Panel pole PC stand
- Chiller
- Transformer
2023 Vintage

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