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Harp C 5200 Producer Spare Parts

Asset #: 76965

Make: Harp

Model: C 5200

Wafer Sizes: 8 inch

Last Confirm Date: February 28, 2024

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Harp C 5200 Producer Spare Parts, 8"
- P/N 0243-03031 Actuator kit, insert slit valve
- P/N 0190-511512 Valve inject 208V TEPO/TEOS/TEB STEC 2410AV-03
- P/N 3030-17605 Digital LFM, EVD1 TEOS 3.0PM 1/4FVCR-I
- P/N 1350-01173 Ozone Backside Pressure, XDCRPRESS 60 PSI CAJON 4VCR-M +/-15VDC W/O NI
- P/N 0190-62378 Ozone Sensor, Ozone Monitor, TAPI M452 with OP-39 Lamp
- P/N 3870-00672 Foreline Valve, Valve PNEU BLWS Angle N/C KF50 CHAMRAZ Seal
- P/N 0010-17871 Heater Assy HA-12 Harp 200mm SACVD RD Base
- P/N 0190-49627 Ozone Generator AX8407-09A 5-25 SLM
- P/N 0190-41326 RPS Generator CIP Astron 2L
- P/N 0190-63486 UPS Throttle Valve Flapper MKS 200mm

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