Applied Materials Endura CL PVD (Physical Vapor Deposition)
-Chamber: D (PC-XT), 1 (IMP), 2/3 (TxZ)
- RGA Rack: none
- Scanner (x1)
- Generator Rack (x2)
- Distribution Rack (x1)
- AC rack (x1)
- Software Version: FE, FI, RT
- POD (2 each)
- Flex Controller: VME Type (SBC 452)
- Light Curtain: FABS Type (Japan)
- Robot Type: Kensington
Aligner Type: Single Axis Stand Alone
- Passthrough Option:Dummy 12 slot
-SW loadlock Type: STD SWLL
Degas Module Option: Lamp module
- Dagas Chamber (2 ea)
- Chamber Type: STD Heater type
- Chamber A: Passthrough
- Chamber B: Cooldown
- Lid Type: Clear Lid
Buffer and Transfer:
- Robot Type: VHP Robot
- Slit V/V Assy's (12 ea)
- Slit V/V Door (12 ea)
- Chamber insert
- Monolith lifter install
Chamber 1:
- Processing Type: Vectra IMP
- Magnet
- Adapter: IMP
- Weldment Type: STD
- Controller Tower Type: CL STD
- Lid Hoist Type: Gas Spring
- Heater Type: B 101
- Gate V/V Type: 3Pos
- MFC (1 each)
Chamber 2:
- Process Type: TxZ
- Gas Box Type: TFTE DLI
- Gas Delivery & Exhaust: TFTE
- Pump: Turbovac 361C
- Heater Type: TxZ STD
- Turbo Isolation Valve: Angle Valve
- Baratron Gaugue: 2T / 100Torr
- MFC: STEC (5 ea)
Chamber 3:
- Process Type: TxZ
- Gas Box Type: TFTE DLI
- Gas Delivery & Exhaust: TFTE
- Pump: Turbovac 361C
- Purge Module: BOT/EDGE/BS
- Baratron Gaugue: 2T/1000Torr
- MFC: STEC (5 ea)
Chamber D:
- Process Type: PC-XT
- Resonator Type: w/Fan Resonator
- Controller Tower Type: CL STD
- Gate V/V Type: 2pos
-Pump Type: Turbovac 1000C
- Shutter Option: none
- Bias Match Option: Present (13.56MHz)
- MFC: STEC (2 ea)
DI Max Cooler:
- DI MAx
Chiller:
- Steelhead 1
SUB Rack:
- Distribution Rack (1 ea)
- Generator Rack (1 ea)
- AC Rack (1 each)
- Transformer Rack: none
Power Supply Item
- Ch1: Dual Pinnacle 10kW+6kW HFV (1 ea), 8000 5kW (1 ea)
- Ch2: COMDEL CLX-2500 (1 ea)
- Ch4
- ChC
-ChD: ENI GMW-25A 2MHz (1 ea), ENI GHW-12A 13.56 MHz (1 ea)
- TDMAT Auto Re-fill Gas Cabinet
- Abatement Device 1/2
- Umbilical Cable
- Pump Frame Accessories
- System Bracket
- Infecon RGA Accessories
Missing:
- Kensington Robot 1
- Robot controller 1/2
- Monitor rack
- FI HDD/ FDD
- CD ROM
- FI CPU BD
- Cryo pumps (for Degas Chamber, Chamber 1, & Buffer/Transfer)
- SBC452 BD (for Buffer/Transfer)
- P-III CPU BD (for Buffer/Transfer)
- Buffer Interlock BD (for Buffer/Transfer)
- FD HDD (for Buffer/Transfer)
- RT HDD (for Buffer/Transfer)
- FE/ RT FDD (for Buffer/Transfer)
- VHP Robot Cover (for Buffer/Transfer)
- Coil match option (for Chamber 1)
- Bias match option (for Chamber 1)
- 2MHZ Coil Matching Box (for Chamber 1)
- Bias Matching Box (for Chamber 1)
- Shutter Driver (for Chamber 1)
- Waver Lift Driver (for Chamber 1)
- Bias Pedestal RF Power Cable (for Chamber 1)
- Ion/Convection Gauge Controller (for Chamber 1)
- Pedestal Driver (for Chamber 1)
- Throttle V/V type (for Chamber 2)
- Purge Module (for Chamber 2)
- Chamber Feddthrough (for Chamber 2)
- DI/O BD (for Chamber 2)
- Throttle Valve (for Chamber 2)
- Purge Module MFC (Bottom/Edge/BS) Valve (for Chamber 2)
- Purge Module Bracket
- Lid CVGGF (for Chamber 2)
- TDMAT Bottle (for Chamber 2)
- Chamber Feedtrhough (for chamber 3)
- TxZ Heater & Lift pin (for Chamber 3)
- Purge Module MFC(BS) Valve (for Chamber 3)
- Purge Module Bracket (for Chamber 3)
- Analog BD (for Chamber D)
- Pedestal Lift Ass'y (for Chamber D)
- Lift/Pedestal Driver (for Chamber D)
- Bias Matching Box (for Chamber D)
-Pedestal RF Power Cable (for Chamber D)
- Compressor
- AC Rack DI/O BD (1 ea, for SUB Rack)
- IMP Bias Generator CDX-1250 (for SUB Rack)
- All Dry Pump
2001 Vintage