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Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter
Axcelis NV 8200 Implanter

Axcelis NV 8200 Implanter

Asset #: 76725

Make: Axcelis

Model: NV 8200

Wafer Sizes: 8 inch

Axcelis NV 8200 Implanter, 8"
- Energy config.: from 3 to 250keV (single); up to 750 keV (triple)
- Wafer size 200mm with holders for different wafers sizes
- Dose: > 1E11at/cm²
- Beam current: I < 1mA
- Gas lines:
- 4 process gas lines (BF2/PH3/AsH3/Hydrogen)
- 1 gas line (Argon)
- Ion sources: 3 ion sources with dual vaporizer on each source
- Magnet: Dipole magnet 90° - Buckley Systems – de 0 a 75 AMU in full charge
- Target positioning/ scanning system:
- Parallel beam
- Electrostatic angle correction programmable
- Tilt 0°-60°
- End station:
- Flat/notch alignment with buffet cassette (3 cassette positions)
- 3 axis robotic
- Pick & Place system
- Cryo compressor: CTI Cryogenics 9600
- Turbo pumps:
- Edwards STP 1003C for Source
- Pfeiffer HiPace 300 + Pfeiffer TPH 1201 P for Beam Line
- Rough pumps:
- Adixen A 103 P for Source
- Adixen A 103 P for Beam Line
- Alcatel/Adixen ADS 602 P for End Station
- Clamp type: Electrostatic clamp
- Soft: SPARC V
- Non-functional modules: PC remote
1996 Vintage

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