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Applied Materials Centura TPCC RTP XE+ Etcher

Asset #: 76714

Make: Applied Materials

Model: Centura TPCC RTP XE+

Wafer Sizes: 8 inch

Last Confirm Date: February 20, 2024

Applied Materials Centura TPCC RTP XE+ Etcher, 8"
CH A: XE+ Non-Toxic ATM
- Chemraz O-Ring
- RGA Port and Valve
- MWBC
- Edge Ring: S2
Bearing Type: Standard
CH B: Empty
CH C: Empty
CH D: Empty
CH E: Single Slot Fast Cooldown
CH F: Single Slot Fast Cooldown
Gas Delivery Options:
- 10 Ra Gas Panel
- Top Feed Gas Line Input
- Multiple Line Drop Gas Distribution
- Individual Gas Line Lockout Tagout
- STEC Z500 MFC Type
First Manifold
- Gas Line Purge: N2-10 SLM
- Gas Line 1: 02-10 SLM
- Gas Line 2: N2-20 SLM
- Gas Line 3: 02 1SLM SLM
- Gas Line 4: None
- Asyst LPT2200 SMIF Robot
- VIta Computer Controller (Modular Controller)
- Controller Bottom feed AC Cables
- SMC 40 GPM Stainless Steel Heat Exchanger

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