{"product_id":"76713","title":"SPTS \/ STS CPX Pegasus Etcher","description":"SPTS \/ STS CPX Pegasus Etcher, 8\"\u003cbr\u003e- 2 Chambers\u003cbr\u003e- 380 Volts\u003cbr\u003e- 60Hz\u003cbr\u003e-160 Amps\u003cbr\u003eThe Transport Module’s components: \u003cbr\u003e- Transport Module Chamber \u003cbr\u003e- Brooks MagnaTran 7 robot \u003cbr\u003eRF Generator Units:\u003cbr\u003e- Source RF Generator: MKS 6.5 kw RF Power Generator \u003cbr\u003e- Platen RF Generator: MKS\/ENI ACG 3B 13.56MHz RF Generator \u003cbr\u003ePumping System: \u003cbr\u003e- Rotary Pump: 3 PCS \u003cbr\u003e- Turbo pump: 2 PCS \u003cbr\u003eCooling and Heating Systems: \u003cbr\u003eFour heating\/cooling systems:\u003cbr\u003e- House Water \u003cbr\u003e- DI Water: SMC HRZ-L2-DY chiller \u003cbr\u003e- Silicon oil: SMC HRZL-D chiller \u003cbr\u003e- Insert Heaters \u003cbr\u003ePressure System: \u003cbr\u003e- MKS Baratron gauge (10-4~10-1 m Torr) \u003cbr\u003e- MKS 750 capacitance (10-760 Torr) \u003cbr\u003e- BOC EDWARDS Active gauge (10-4mTorr~10Torr) \u003cbr\u003e- ESC (ceramic) - C4F8 Flow rate, ±2 % vibration (Analogy MFC 400 sccm) \u003cbr\u003e- SF6 Flow rate, ±2 % vibration (Analogy MFC 1200 sccm) \u003cbr\u003e- Ar Flow rate, ±2 % vibration (Analogy MFC 500 sccm) \u003cbr\u003e- O2 Flow rate, ±2 % vibration (Analogy MFC 200 sccm) \u003cbr\u003e- Chuck He Pressure, ±2 % vibration \u003cbr\u003ePressure:\u003cbr\u003e- PM Pumpdown \u003cbr\u003e      Pressure 500m Torr \u003cbr\u003e      APC valve open \u003cbr\u003e- LL Pumpdown \u003cbr\u003e      Pressure 80m Torr \u003cbr\u003e- Temperature, ±2 oC vibration \u003cbr\u003e- Forward power, ±1% vibration \u003cbr\u003e- Ref power, ±1% vibration \u003cbr\u003e- Gases: \u003cbr\u003e   - SF6 : Purity 99.999%(5N) \u003cbr\u003e   - C4F8 : Purity 99.999%(5N) \u003cbr\u003e   - O2 : Purity 99.9995%(5N5) \u003cbr\u003e   - N2 : Purity 99.9995%(5N5) \u003cbr\u003e   - Ar : Purity 99.9995%(5N5)\u003cbr\u003e2006 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817196351678,"sku":"76713","price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/6-22_c088b754-239c-40ca-a730-4dc4a8213e26.jpg?v=1737609621","url":"https:\/\/www.bridgetronic.com\/products\/76713","provider":"Bridge Tronic Global","version":"1.0","type":"link"}