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SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher
SPTS / STS CPX Pegasus Etcher

SPTS / STS CPX Pegasus Etcher

Asset #: 76713

Make: SPTS / STS

Model: CPX Pegasus

Wafer Sizes: 8 inch

Last Confirm Date: February 20, 2024

SPTS / STS CPX Pegasus Etcher, 8"
- 2 Chambers
- 380 Volts
- 60Hz
-160 Amps
The Transport Module’s components:
- Transport Module Chamber
- Brooks MagnaTran 7 robot
RF Generator Units:
- Source RF Generator: MKS 6.5 kw RF Power Generator
- Platen RF Generator: MKS/ENI ACG 3B 13.56MHz RF Generator
Pumping System:
- Rotary Pump: 3 PCS
- Turbo pump: 2 PCS
Cooling and Heating Systems:
Four heating/cooling systems:
- House Water
- DI Water: SMC HRZ-L2-DY chiller
- Silicon oil: SMC HRZL-D chiller
- Insert Heaters
Pressure System:
- MKS Baratron gauge (10-4~10-1 m Torr)
- MKS 750 capacitance (10-760 Torr)
- BOC EDWARDS Active gauge (10-4mTorr~10Torr)
- ESC (ceramic) - C4F8 Flow rate, ±2 % vibration (Analogy MFC 400 sccm)
- SF6 Flow rate, ±2 % vibration (Analogy MFC 1200 sccm)
- Ar Flow rate, ±2 % vibration (Analogy MFC 500 sccm)
- O2 Flow rate, ±2 % vibration (Analogy MFC 200 sccm)
- Chuck He Pressure, ±2 % vibration
Pressure:
- PM Pumpdown
Pressure 500m Torr
APC valve open
- LL Pumpdown
Pressure 80m Torr
- Temperature, ±2 oC vibration
- Forward power, ±1% vibration
- Ref power, ±1% vibration
- Gases:
- SF6 : Purity 99.999%(5N)
- C4F8 : Purity 99.999%(5N)
- O2 : Purity 99.9995%(5N5)
- N2 : Purity 99.9995%(5N5)
- Ar : Purity 99.9995%(5N5)
2006 Vintage

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