AIO Duna 700 SOE Coater System, up to 6"
Includes:
- NetTrack Recipe Management Software inside
- Dual Track
- NetTrack CPU board
- 3 refurbished CYBOR photo resist pumps with controller
- Brushless motor and servo controller
- 4” size conversion kit
- There is Windows XP PC 2pcs (develop/resist) Originally there was no PC
Specifications:
- Wafer type: Silicon round wafer
- Wafer flow: left to right
- Power: 220/240V, Single Phase, 50/60Hz
- Rear of the cabinet facilities access
- Standard poly floors
- Teflon insulated mainframe wiring
- NetTrack CPU Board
- Direct interchangeable with SVG CPU
- Can store up to 99 programs
- Capable component exercise
- NetTrack Recipe Management
- Compatible to SVG86/88 Series Track system
- Unlimited recipe storage and secure on PC hard disk
- Real-time process alarm & event capturing and information display
- Network host recipe data automation
Module Specifications:
- Index Assembly
- Capacitance wafer sensor
- 3/16” inch pitch (25 wafer cassette setup)
- Sliver Teflon Coated Platform
Hot Plate Oven Assembly
- Clear anodized 3 pin Hot Plate Oven Assembly (Temp. spec: Less than +/- 0.5C
- 3-pin lift for wafer handling
- AIO enhanced Cast-In Heating element, 220V, 450W
- Watlow Controller with PID control
- Auto tuning +/- 0.1% calibration accuracy
+/- 0.1C temperature uniformity
- Digital LED display
- Proximity or contact bake control
- Common stainless steel exhaust manifold assembly
- 1/10th read out RTD temperature probe
- 50C to 250C temperature range
- HBO exhaust cover (special feature of DUNA 700 system)
Coat Module Assembly
- Programmable Pivoting moving dispense with 3 dispense lines and TOP EBR assy
- AIO Low Profile Catch Cup Assembly with build-in Bottom EBR
- Brushless spin motor and servo controller is included
- Pre-dispense cup with programmable pre-dispense up to 99 cycles
- Pivoting Z Axis Moving Dispense
- (3/16”, 3/16”, 3/16”) size dispense nozzle
- Digital Vacuum Switch
- Top and Bottom EBR
- Interlocked safety cover to stop process when removed
- Center collection 1 gallon drain jar with high level sensor to link to alarm panel
- Solvent Vapor Tip Bath
- Purge system for Dispense linePositive Developer Module Assembly
- Programable Moving Dispense Assy
- Neslab CTD Cart is included
- Brush high spin motor is included
- Spray and stream and back wash nozzle
- Digital Vacuum Switch
- Interlocked safety cover to stop process when removed
- Direct drain to the customer drain line
ATS (Automatic transfer System) Assy