{"product_id":"76653","title":"Evatec \/ Oerlikon Balzers BAK 1401 MS Split Thin Film Evaporator","description":"Evatec \/ Oerlikon Balzers BAK 1401 MS Split Thin Film Evaporator\u003cbr\u003e- ESQ213B E-Gun\u003cbr\u003e- EHV500 High Voltage Power Supply\u003cbr\u003e- ECS500 Coil Current Power Supply\u003cbr\u003e- QCM500 Deposition Controller\u003cbr\u003e- QSK621D Film Thickness Measurement\u003cbr\u003e- 8 Pocket Crucible\u003cbr\u003e- Khan Server\u003cbr\u003e-EB500 Rack\u003cbr\u003e- (QTY: 2) Wire Feeder\u003cbr\u003eNonmagnetic stainless steel vacuum and additional source chamber with:\u003cbr\u003e- door incl. view port with view to source\/substrate \u003cbr\u003e- clean room front (polished)\u003cbr\u003e- aluminum profile frame\u003cbr\u003e- 1 complete set of protection shields\u003cbr\u003e- basic tool set\u003cbr\u003eSource Chamber:\u003cbr\u003e- Nonmagnetic stainless steel vacuum chamber with source chamber, including service door\u003cbr\u003e- VAT 800 high vacuum gate valve between process and source chamber\u003cbr\u003e- VAT 14046 (DN 200) high vacuum valve with \u003cbr\u003e- 1 vacuum control gauge (1 MPG500)\u003cbr\u003e- 1 complete set of protection shields\u003cbr\u003eProcess control system \"Khan Server\" with GUI\u003cbr\u003e- Server based operating system with the following components:\u003cbr\u003e- state of the art memory\u003cbr\u003e- CR\/DVD drive R\/W\u003cbr\u003e- two redundant hard drives, RAID controlled\u003cbr\u003e- digital and analog input \/ output modules\u003cbr\u003e- USB ports\u003cbr\u003e- KHAN controller with GUI\u003cbr\u003e- Software: 1 to 4 window user interface\u003cbr\u003eSecs\/Gem License: license on existing Secs\/Gem host\u003cbr\u003eElectrical \/ power \/ control rack separated: \u003cbr\u003e- 19\" rack with service door and main power switch\u003cbr\u003e- 19\" touchscreen monitor, separated keyboard and mouse\u003cbr\u003eUPS: protects server based operating system with KHAN controller\u003cbr\u003eEBS500 rack: attached to electrical rack or free standing\u003cbr\u003eAdditional set of protection shields\u003cbr\u003eChevron water cooled with protection shield\u003cbr\u003eFree standing media distributor\u003cbr\u003e- water and compressed air manifold: interface between facility and system\u003cbr\u003eMeissner trap: working with liquid nitrogen, installed between HV valve and HV pump\u003cbr\u003ePolycold PFC672: Cryogenic refrigeration unit\u003cbr\u003ePump system:\u003cbr\u003e- Additional venting device for Soft Vent\u003cbr\u003e- Pressure gauges: 1 x MPG500, 2 x TPR280\u003cbr\u003e- (2) High vacuum pump Cryo CTI500, Brooks with on-Board controller and corresponding compressor\u003cbr\u003e- (2) High vacuum valve DN500, w\/out throttle: DN500 ISO-F, pendulum\u003cbr\u003eRotary drive and calottes:\u003cbr\u003e- (2) BD223 rotary drive with control board and rotary sensor\u003cbr\u003e(2) Set of segmented calotte:\u003cbr\u003e- 3 segmented calotte, machined for 24 x 6\" wafers\u003cbr\u003e- Radius: 1000mm (lift off geometry)\u003cbr\u003e- Notch orientation tbd\"\u003cbr\u003e(2) Set of segmented calotte:\u003cbr\u003e- 3 segmented calotte, machined for 24 x 8\" wafers\u003cbr\u003e- Radius: 1000mm (lift off geometry)\u003cbr\u003e- Notch orientation tbd\"\u003cbr\u003eHeater:\u003cbr\u003e- Thermo couple and control unit for process temperature controlling\u003cbr\u003eSources Evaporation:\u003cbr\u003e- E-Gun ESQ213B source body includes:\u003cbr\u003e- set (10 pieces) of spare filaments\u003cbr\u003e- basic tool set\u003cbr\u003e- High voltage feed through EHD210A with all connections to the e-gun\u003cbr\u003e- Control unit EEC510 with media supply for two sources, incl. ER050 manual remote control\u003cbr\u003e- High voltage power supply EHV500: 10kV \/ 10 kW\u003cbr\u003e- Filament current power supply EFS500: 0-60A\u003cbr\u003e- Coil current power supply ECS500: 19\" rack mountable\u003cbr\u003e- 8 pocket crucible\u003cbr\u003e- Holder for crucible: water cooled\u003cbr\u003e- Movable cover for crucible\u003cbr\u003e- (2) Automated wire feeder for automated refill of Au from a wire drum consisting of: \u003cbr\u003e- non magnetic stainless steel assembly\u003cbr\u003e- drums for Au (Au wire not included)\u003cbr\u003e- Shaper holder: installation frames\u003cbr\u003e- (2)Shaper: distribution shields for uniformity optimization\u003cbr\u003e- Shutter drive: compressed air shutter drive\u003cbr\u003e- (2) Shutter: for sources\u003cbr\u003eMeasuring Equipment:\u003cbr\u003e- QSK621D film thickness measurement: central mounted, holder for 6 crystals including set (10 pcs) of spare crystals\u003cbr\u003e- Deposition controller unit for quartz measurement: \u003cbr\u003eQCM500 consisting of:\u003cbr\u003e- (1) QCU500 (possible to connect up to 4 x QC0500)\u003cbr\u003e- (1) QCO500\u003cbr\u003e- Inc. all needed cables between QSK, QCM and Khan\u003cbr\u003e2017 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44817193631934,"sku":"76653","price":0.0,"currency_code":"USD","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0651\/6175\/6862\/files\/32-2_d4772943-f6ed-47b2-9b1d-13602b906091.jpg?v=1737609393","url":"https:\/\/www.bridgetronic.com\/products\/76653","provider":"Bridge Tronic Global","version":"1.0","type":"link"}