Evatec / Oerlikon Balzers BAK 1401 MS Split Thin Film Evaporator
- ESQ213B E-Gun
- EHV500 High Voltage Power Supply
- ECS500 Coil Current Power Supply
- QCM500 Deposition Controller
- QSK621D Film Thickness Measurement
- 8 Pocket Crucible
- Khan Server
-EB500 Rack
- (QTY: 2) Wire Feeder
Nonmagnetic stainless steel vacuum and additional source chamber with:
- door incl. view port with view to source/substrate
- clean room front (polished)
- aluminum profile frame
- 1 complete set of protection shields
- basic tool set
Source Chamber:
- Nonmagnetic stainless steel vacuum chamber with source chamber, including service door
- VAT 800 high vacuum gate valve between process and source chamber
- VAT 14046 (DN 200) high vacuum valve with
- 1 vacuum control gauge (1 MPG500)
- 1 complete set of protection shields
Process control system "Khan Server" with GUI
- Server based operating system with the following components:
- state of the art memory
- CR/DVD drive R/W
- two redundant hard drives, RAID controlled
- digital and analog input / output modules
- USB ports
- KHAN controller with GUI
- Software: 1 to 4 window user interface
Secs/Gem License: license on existing Secs/Gem host
Electrical / power / control rack separated:
- 19" rack with service door and main power switch
- 19" touchscreen monitor, separated keyboard and mouse
UPS: protects server based operating system with KHAN controller
EBS500 rack: attached to electrical rack or free standing
Additional set of protection shields
Chevron water cooled with protection shield
Free standing media distributor
- water and compressed air manifold: interface between facility and system
Meissner trap: working with liquid nitrogen, installed between HV valve and HV pump
Polycold PFC672: Cryogenic refrigeration unit
Pump system:
- Additional venting device for Soft Vent
- Pressure gauges: 1 x MPG500, 2 x TPR280
- (2) High vacuum pump Cryo CTI500, Brooks with on-Board controller and corresponding compressor
- (2) High vacuum valve DN500, w/out throttle: DN500 ISO-F, pendulum
Rotary drive and calottes:
- (2) BD223 rotary drive with control board and rotary sensor
(2) Set of segmented calotte:
- 3 segmented calotte, machined for 24 x 6" wafers
- Radius: 1000mm (lift off geometry)
- Notch orientation tbd"
(2) Set of segmented calotte:
- 3 segmented calotte, machined for 24 x 8" wafers
- Radius: 1000mm (lift off geometry)
- Notch orientation tbd"
Heater:
- Thermo couple and control unit for process temperature controlling
Sources Evaporation:
- E-Gun ESQ213B source body includes:
- set (10 pieces) of spare filaments
- basic tool set
- High voltage feed through EHD210A with all connections to the e-gun
- Control unit EEC510 with media supply for two sources, incl. ER050 manual remote control
- High voltage power supply EHV500: 10kV / 10 kW
- Filament current power supply EFS500: 0-60A
- Coil current power supply ECS500: 19" rack mountable
- 8 pocket crucible
- Holder for crucible: water cooled
- Movable cover for crucible
- (2) Automated wire feeder for automated refill of Au from a wire drum consisting of:
- non magnetic stainless steel assembly
- drums for Au (Au wire not included)
- Shaper holder: installation frames
- (2)Shaper: distribution shields for uniformity optimization
- Shutter drive: compressed air shutter drive
- (2) Shutter: for sources
Measuring Equipment:
- QSK621D film thickness measurement: central mounted, holder for 6 crystals including set (10 pcs) of spare crystals
- Deposition controller unit for quartz measurement:
QCM500 consisting of:
- (1) QCU500 (possible to connect up to 4 x QC0500)
- (1) QCO500
- Inc. all needed cables between QSK, QCM and Khan
2017 Vintage