Nikon NSR S 204 B Scanner
Recent Tool Performance Data:
Feb. 2020
The real measured Dynamic Distortion results were (Raw data):
- Max X = 0.006
- Max Y = 0.007
- Min X= -0.064
- Min Y = -0.009
- In case you would apply ideal compensation values (Removed Scan Elements) the
achievable Dynamic Distortion could be
- Max X = 0.008
- Max Y = 0.009
- Min X= -0.011
- Min Y = -0.008
- LaserResolution ≦ 150 nm
- NA 0.68
- Exposure light source KrF excimer laser (248 nm wavelength)
- Reduction ratio 1:4
- Exposure field 25 × 33 mm
- Alignment accuracy (EGA, |M| + 3σ) ≦ 35 nmOverview
- 6" Reticle; 300mm Wafer, 3 & 6 o’clock
- 248nm Wavelength, Reduction Ratio 4:1, NA 0.68 (max)
- KrF Laser (Cymer ELS-6400), 25 x 33 mm2 Field Size
- Resolution: 180 nm
- Resolution RET 150 nm
- Manufactured: June 2002
Imaging:
- Projection Lens (4:1)
- Software Controlled Variable N.A. (0.55 - 0.68)
- 25 x 33 mm2 max. Exp. Area
- SHRINC Resolution Enhancement Technology
- Real Time focus/level sensor
- Chip (Table) Levelling
- MAC Real Time Lens Control
Light Source:
- KrF Excimer Laser (20 W, 2 kHz)
- Standard Beam Matching Unit (BMU)
Overlay:
- Laser Step Alignment (LSA)
- Field Image Alignment (FIA)
Material Handling:
- Air bearing wafer stage (linear motors)
- In-Line Track Interface (LHS)
- Robotic Wafer Loader Type III
- Non-contact Prealignment 2
- S204B Pin Wafer Holder (300mm, Lattice type, pre-owned)
- Reticle Loader (Nikon Standard Type)
- Reticle Size: 6” x 0.25” thick
Automation:
- Control Rack
- System Computer with MCSV Operation Software (non-transferable license)
- PPDSX Software (Job server software) & 1x S204B connection license
- Job Cascading Software
- NEST-A computer
Metrology Utilities / Software:
- Aerial Image Sensor (AIS)
- TTL Focus Calibration (TTL-FC2)
- Measurement & Evaluation Software (MES, requires MF test reticle)
- Maintenance Tool Software
- GCM Software (Grid Compensation for Matching)
- CDP Software (Continuous DOF Expansion Procedure)
System Structure:
- Main Unit
- Active Vibration Isolation System (AVIS)
- Nitrogen Purge
- Chemical Filters
- Environmental Chamber
Options included
System Structure:
- PL purge
- Lamp Signal Tower
Material Handling:
- Pellicle Particle Detector (PPD)
- Barcode Reader (BCR)
Imaging:
- RET illumination apertures
Software:
- Online Software (GOCS)
Metrology Utilities:
- Test Reticle, R2504HA
- Test Reticle, R2504HB
- Test Reticle, R2504HDIS
- Test Reticle, R2504HMF
- Test Reticle, R2504HCD
- Change of chemical filters necessary
- CE Marking known performance problems
- Stage SYNC improvement necessary – alignment problems inter field
- Intermittent shot failures (single shots) during exposure
- Exchange RL robot and fork (most probably) necessary
2002 Vintage