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Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher
Lam Rainbow 4520 Etcher

Lam Rainbow 4520 Etcher

Asset #: 76457

Make: Lam

Model: Rainbow 4520

Last Confirm Date: February 26, 2024

Lam Rainbow 4520 Etcher
- Hine indexer
- 1 chamber
Automation online component: SECS/GEM
- No fixed gap chamber
- EPD: Verity EP200Mmd (250~730nm)
- Surface finish: 10 RA
- Standalone Gas Box mounting
- Standalone Gas Box Std stacking kit
- Gas lines: 8
- GAS 1:Ar_1000 sccm (UFC-1200A)
- GAS 2:CF4_200 sccm (UFC-1200A)
- GAS 3:CHF3_100 sccm (UFC-1200A)
- GAS 4:N2_50 sccm (UFC-1661)
- GAS 5:O2_20 sccm (UFC-1661)
- GAS 6:SF6_20 sccm (UFC-1200A)
- GAS 7:Ar_100 sccm (UFC-1200A)
- GAS 8:cf4_20 sccm (UFC-1200A)
- Orbital Gas panel
- Helium pressure controller: Unit UPC
Vacuum System:
- AOV 85 exist: N2:50sccm
- Chamber manometer: 10 Torr
- Pressure control valve: throttle valve, 839-013901-001
Temperature Control:
- Chiller type: M/W 2080
- Temp control system: Anafaze
RF System:
- RF generator: AE PDW2200
- Match: LOFAT
Computer System:
- Software version: Envision 1.5 above
- PC: Intel P4 1.2Hz above
- Monitor: TFT LCD

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