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Varian Viision 200 Plus High Current Implanter
Varian Viision 200 Plus High Current Implanter

Varian Viision 200 Plus High Current Implanter

Asset #: 76425

Make: Varian

Model: Viision 200 Plus

Varian Viision 200 Plus High Current Implanter
- Version:150 MM
Machine Specific Configuration:
-Implant Disc:18 Site, Silicon Coated
- Two-dimensional beam profiler
- CE-Mark: yes
- Average Uptime: 85%
- Computer System: 147MHz Main & ES CPU
- Software: 6.24
- Backup Disc: SSD Drive
- Cleanroom Monitor: TFT
- Remote Service Monitor: TFT / in house manufactured
Gasbox Configuration:
- String #1 - SDS MKS-P2A 10 sccm Arsenic
- String #2 - SDS MKS-P2A 10 sccm Phosporus
- String #3 - HP Unit UFC-8100 10 sccm N2
- String #4 - HP Tylan FC-2900MEP 5 sccm BF3
- External Inert Gas Feed and Purge
Source / Beamline Configuration:
- Source Chamber Shield Kit: yes 1 included
- Bernas: 1 Spare available
- No Mass Slit Shield Retrofit
- New Infranor Amplifier Xtra Pulse
- Spin Amp Kollmorgen Servo Star S700
Vacuum System Configuration:
-Terminal Rough Pump: Edwards, not included (Available at extra cost)
-Terminal Differential Pump: Varian Membrane Pump
- Source Turbo: Pfeiffer 1500
- Beamline Turbo: Pfeiffer 1200
- Endstation Manifold Turbo Pump: Pfeiffer 250
- Endstation Rough Pump: Edwards, not included (Available at extra cost)
- Endstation Differential Pump: Busch Membrane Pump
- Cryo Compressor (2x): CTI 9600
- Cryo Pump (4x): CTI 250F
- 4th cryo pump installed
- Rough Pump: Edwards, not included (Available at extra cost)
1997 Vintage

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