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Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher
Applied Materials Centura AP Enabler Dielectric Etcher

Applied Materials Centura AP Enabler Dielectric Etcher

Asset #: 75780

Make: Applied Materials

Model: Centura AP Enabler

Last Confirm Date: December 27, 2023

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Applied Materials Centura AP Enabler Dielectric Etcher
- HDD not included
- Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
- Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
- Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant
- MENV and FMS assemblies
- Interface A: Hardware related to EDA
- Corrosion Resistant FI & SWLL: N/A
- Loader Mod Corrosion Prevent: N/A
- Standard SWLL: Standard SWLL
- Side Storage Pod: Side Storage Pod (Left/Right)
- OCR: KIT, YAT BACKSIDE OCR, 300MM 5.3FI
- Facility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard
- SMC pressure switch
- Facility Plate: Manual Valve : Supplied by customer in floor
- Facility Plate: Pressure Gauge : Supplied by customer on regulator in floor
- Transfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kit
- Transfer Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
- Load Lock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
- Transfer Chamber Blade Kit: Transfer Chamber Accelerator Blade Kit
- LL ISO-Slit Valve Grp Elast.: AP Chemraz 513 Elastomer
- Atmospheric Robot: KAWASAKI A3
- Mainframe Robot: VXP with Dual blade
- Wafer Pass Through: Not available
- Loadport type: Enhanced 25 wafer FOUP
- Loadports: Loadport System
- Open Cassettes Supported: N/A
- Water Leak Detector: Configured
EMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each
side of FI. Rear: 1 for each process chamber.
- System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the
wall flat panel (optional)
- 208V, 50/60Hz
2010 Vintage

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