KLA Surfscan SP 2 Particle Defect System
Substrate:
- Supported Sizes: 300mm (vacuum handling)
- SEMI standard wafer geometry
- Material: Any opaque, polished surface that scatters ≤ 10% of incident light
Defect Sensitivity: >37nm
Repeatability:
- Count: CV* ≤ 1%, for mean count > 5000
- CV = coefficient of variance, σ/µ
Edge Exclusion: ≥3 mm for all wafer sizes and illumination modes
XY Coordinates (optional):
- 95th percentile ≤ 15 µm radius, normal or oblique illumination, High Sensitivity
- 95th percentile ≤ 50 µm radius, normal or oblique illumination, High Throughput
Throughput:
Vacuum Handling Configurations
- 300 mm (Open handler configurations)
- @0.08 µm (HT) / Frontside: 90 wph
- @0.06 µm (HS) / Frontside: 22 wph
Edge Handling / BSIM Configurations:
- 300mm
- HT Frontside 40 wph / Backside 35 wph
- HT Frontside 12 wph / Backside 10 wph
Contamination: ≤0.001 particles (≥0.1 µm)/cm2 /pass frontside
Cassette Handling:
- Vacuum Handling
- Standard: 300mm open cassette
Operator Interface: Keypad, trackball and keyboard standard
Operating System: Windows XP
Dimensions:
- Handler: 207 x 152 x 132cm
- Inspection Station: 223 x 180 x 71cm
Weight:
- Inspection Station: ~ 519.4 kg
- Handler: ~ 510 kg
Facilities Requirements:
- House vacuum, compressed air or N2 (required for FIMS, SMIF, Edge Handling, and BSIM Configurations),
- 1 Phase AC Power
- Please consult SP2 Pre-Installation Guide for specific requirements