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KLA / Therma-wave TP 500 Implant Dose Measurement

Asset #: 75553

Make: KLA / Therma-wave

Model: TP 500

Last Confirm Date: December 12, 2023

KLA / Therma-wave TP 500 Implant Dose Measurement
The following have been replaced on the tool:
- Main contact in the PDU, the power distribution board, tracker distribution bd, stage controller-galil board, blower unit, cpu bd, upgraded the software from 1.3a8 to 1.5a3
- One pump laser is missing
2000 Vintage

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